Bake/Chill Pedestal Heaters
The cast-in pedestal heater for semiconductor processing is basically a bake or chill platen that has an aluminum "neck" attached to the underside of the platen by electron beam welding or friction welding if dissimilar materials are required by the customer. A helium leak test is performed to insure a vacuum tight assembly. The surface of the cast-in pedestal is precision machined with a flatness tolerance of .0005" and typically includes lift pin holes and proximity pins per individual specifications. The cast-in pedestal heater can also include an integrated temperature sensor.
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