Semiconductor Processing 

Durex Industries continues to be an innovative supplier of solutions for semiconductor processing applications requiring precision engineering design and superior thermal performance.

As thermal component performance becomes more critical in process equipment, the engineering demands are seeking innovative solutions and new methodologies to match the performance requirements. Durex provides “hands on” engineering support and FEA analysis from product conception with a short line of communication from project engineer to prototype completion. Rapid prototyping services guarantee milestone completions with opportunities for multiple iterations within the project window.

Production parts are strictly controlled with process of record manufacturing and ISO 9001:2008 quality assurance procedures. Durex also provides vertically integrated solutions for the entire manufacturing process including chem. cleaning, Class 1000 clean room packaging, hard-coat anodizing, uniformity verification, and accelerated life cycle testing.



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Semiconductor Processing Applications
  • CVD
  • Photolithography
  • Stripping
  • PVD
  • Etching
  • Probing
  • Wafer Annealing
  • Plasma Ashing
  • Flat Panel


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Products
These compact, low mass, electric in line circulation heaters are ....

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The particular application conditions of.....

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Utilizing state of the art heater technology, Durex manufactures precision cast-in bake platen heaters specifically for semiconductor processing 200mm and 300mm wafers.

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The cast-in pedestal heater for semiconductor processing is basically a bake or chill platen that has an aluminum “neck” attached to the underside of the cast-in platen by electron beam welding.

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The cast-in bake/chill platen heater for semiconductor processing has essentially the same operating specifications as the cast-in bake platen with the addition of a cooling function.

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Durex manufactures cast-in hot chucks or “heated tools” for semiconductor processing that deliver precise heat to wafers during the manufacturing process.

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When temperatures exceed the 450°C-temperature range offered by aluminum platen heaters, Durex offers a unique high temperature platen heater to extend the range available for a machined heater.

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Mineral insulated cable heaters are designed as a high temperature heat source for specific areas or locations. The versatility of the design makes this heater a superior choice for semiconductor processing applications.

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Tubular heating elements used for semiconductor processing require specific manufacturing controls to insure performance criteria not available in conventional heating elements.

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The standard cast-in pedestal heater manufactured by Durex for semiconductor processing is designed to provide a quick solution for wafer processing applications.

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Mineral insulated thermocouples are manufactured with compacted MgO insulation housed in a stainless steel or alloy sheath that protects the thermocouple element from the application environment.

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High Performance Thermal Solutions

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