Cast-In Bake Platen Heaters 
Utilizing state of the art heater technology, Durex manufactures precision cast-in bake platens specifically for semiconductor processing 200mm and 300mm wafers.

The cast-in platen heaters are cast of pure aluminum (99.7%) to insure maximum operating temperatures of 450°C with minimum risk of process contamination. The casting process is controlled to eliminate any defects in the machined surface or casting body that would be caused by porosity.

A mineral insulated heating element is distributed throughout the casting to provide surface temperature uniformity of ±1% or better of the process operating temperature. A hard-anodized finish provides an abrasion-resistant dielectric barrier on the working surface of the cast-in bake platen heater.

Design Features
  • Manufactured with state of the art technology
  • Specifically for processing 200mm and 300mm wafers
  • Cast of pure aluminum
  • Mineral insulated heating element distributed throughout
  • Hard-anodized finish


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    Industry Focus
    CVD, Photolithography, Stripping, PVD, Etching, Probing, Wafer Annealing, Plasma Ashing, Flat Panel

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