Cast-In Bake/Chill Pedestal Heaters 
The cast-in pedestal heater for semiconductor processing is basically a bake or chill platen that has an aluminum “neck” attached to the underside of the platen by electron beam welding.

A helium leak test is performed to insure a vacuum tight assembly. The surface of the cast-in pedestal is precision machined with a flatness tolerance of .0005” and typically includes lift pin holes and proximity pins per individual specifications.

The cast-in pedestal heater can also include an integral temperature sensor as part of the assembly.

Design Features
  • Electron beam welding
  • Helium leak test performed to insure vacuum tight assembly
  • Pedestal surface precision machined to flatness tolerance of .0005”
  • Can include integral temperature sensor


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    CVD, Photolithography, Stripping, PVD, Etching, Probing, Wafer Annealing, Plasma Ashing, Flat Panel

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