Cast-In Hot Chuck Heaters 

Durex manufactures cast-in hot chucks or “heated tools” for semiconductor processing that deliver precise heat to wafers during the manufacturing process.

These cast-in platens are individually customized with vacuum channels on the working surface, specific lift pin hole locations, and other surface or backside mounting holes.

Manufactured from pure aluminum (99.7%), these cast-in hot chucks have a temperature uniformity capability of 1% of the process temperature and a flatness tolerance of .0005” across the surface. A hard coat anodized finish is available or the surface can be supplied as a number 16-ground finish.






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Industry Focus
CVD, Photolithography, Stripping, PVD, Etching, Probing, Wafer Annealing, Plasma Ashing, Flat Panel

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