Precision Wound Tubular Heating Elements 

Tubular heating elements used for semiconductor processing require specific manufacturing controls to insure performance criteria not available in conventional heating elements.

Durex manufactures precise tubular heating elements designed to meet the rigorous specifications of wafer processing. Forming of the finished elements are done with strict tolerances and supplied fully tested, ready for use.

On site x-ray capabilities insure exact spacing of the Nichrome resistance wire within the aluminum or stainless steel sheath. Special moisture resistant seals are provided as standard designs.





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Industry Focus
CVD, Photolithography, Stripping, PVD, Etching, Probing, Wafer Annealing, Plasma Ashing, Flat Panel

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