Ohm's Law – Single
Ohm's Law – Triple (Delta)
Ohm's Law – Triple (Wye)
Heat Energy Requirements
Wattage Requirements
  • Cast Vacuum Chamber Heaters

    Cast Vacuum Chamber Heaters are designed to optimize temperature profile in a vacuum chamber.

    Uniform process temperature improves etch and deposition rates and uniformity.

    • Three dimensional cast aluminum assemblies
    • Operating temperature < 450°C (842°F)
    • Aluminum alloys 170.1, 319 or 356
    • Precision machining of vacuum and other features
    • Integral RTD or thermocouple sensors

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