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SENTINEL® Heater and Insulation Systems

----Sentinel HeatersDurex Industries' SENTINEL® Heater and Insulation Systems are a turnkey thermal solution for PECVD, LPCVD, MOCVD, ALD, plasma etch and other vacuum applications. Low vapor pressure gas delivery lines need to be held at a temperature higher than the gas vaporization point in order to prevent condensation that will affect process yields. Vacuum exhaust lines remove the vapor phase by-products from the semiconductor process. Sublimation occurs when the vapor phase materials cool in a vacuum line. By heating the forelines, vacuum lines, and vacuum pumps, sublimation of ammonium chloride (AlCl2), nitrides (NH4) (NH4Cl) and other potentially hazardous materials can be substantially reduced.

The HALO® Temperature Controller and SENTINEL® Gas and Pump Line Heaters are a superior thermal solution for semiconductor applications. Internally, one HALO® temperature controller can monitor the performance and control the temperature of multiple heaters with up to 10 amp resistive loads. Integrated current sensor monitoring of each heater provides engineers with a visual HALO® indication of a heater or wiring failure.

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SENTINEL® Features and Benefits

Process Temperature to 180°C

  • Elevates gas temperature above vapor condensation or sublimation phase
  • Extends life of valves and vacuum pumps

Form-Fit Heater Construction

  • Reduces potential for particle build-up in cold sections
  • Optimum process performance and tool up-time

Structured Silicone Rubber Heaters

  • Reduces system cost by combining the heater constructions for a specific plumbing system
  • Optimizes temperature uniformity for components that require tighter temperature tolerances
  • Reduces thermal system complexity

SENTINEL® Gas and Pump Line Heaters (patent pending)

SENTINEL® Specifications

  • Voltage: 120, 208, or 240 VAC
  • Output power lead wires: #18 AWG UL® insulated wires
  • Rated 10A
  • Watt density typically: <0.23 W/cm2 (1.5 W/in2)
  • Process temperature: 180°C
  • Standard sizes: 0.25" to 6.0" I.D.
  • Color: standard gray, option orange
  • Snap fasteners: 13mm (0.5 inch) nominal diameter
  • Integrated thermal fuse and thermostat options
  • and SEMI-S2

Design and Installation Guidelines HALO-GDPL-1116 - 1.5MB

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