Vacuum Chamber Heaters
Cast vacuum chamber heaters are designed to optimize temperature profile in a vacuum chamber. Uniform process temperature improves etch and deposition rates and uniformity.
- Three-dimensional cast aluminum assemblies
- Operating temperature < 450°C (842°F)
- Aluminum alloys 170.1, 319 or 356
- Precision machining of vacuum and other features
- Integral RTD or thermocouple sensors