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Vacuum Chamber Heaters

Cast vacuum chamber heaters are designed to optimize temperature profile in a vacuum chamber. Uniform process temperature improves etch and deposition rates and uniformity.

 

Product Features:

• Three-dimensional cast aluminum assemblies
• Operating temperature < 450°C (842°F)
• Aluminum alloys 170.1, 319 or 356
• Precision machining of vacuum and other features
• Integral RTD or thermocouple sensors

Contact Durex Industries today to discuss your semiconductor heating requirements.