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Special Material Pedestal Heaters

Special material pedestal heaters provide material compatibility in vacuum applications where aluminum cannot be used because of process temperatures greater than 450°C and/or corrosive chemical environments.

Product Features:

• Operating temperature < 700°C (1292°F)
• Stainless steel (304 or 316), Inconel®, nickel…
• Mill groove heater assembly
• E-beam welded assembly
• Integral RTD or thermocouple assemblies

Contact Durex Industries today to discuss your semiconductor heating requirements.