Hot Chuck Heaters
Durex manufactures cast-in hot chuck heaters or "heated tools" for semiconductor processing that deliver precise heat to wafers during the manufacturing process. These cast-in platens are individually customized with vacuum channels on the working surface, specific lift pin hole locations, and other surface or backside mounting holes. Manufactured from pure aluminum (99.7%), these cast-in hot chucks have a temperature uniformity capability of ± 1% of the process temperature and a flatness tolerance of .0005" across the surface. A hard coat anodized finish is available or the surface can be supplied as a 16 Ra μ-in (0.4 μm) finish.