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High Temperature Platen Heaters

When temperatures exceed the 450°C (842°F) temperature range offered by aluminum platen heaters, Durex offers a unique high-temperature platen heater to extend the range available for a machined heater. The heater body is typically constructed of stainless steel, however other materials such as Nickel, Inconel®, or Copper can be used. The assembly is provided as a single component. A precise groove is machined into the heater body determined by the heat profile requirements of the surface. A mineral insulated heating element is press fit into the groove to guarantee intimate contact with the heater body, which optimizes heater life and temperature uniformity of the working surface. A vacuum braze treatment is also available. In addition to high-temperature platens, these units can be manufactured as pedestals and welded as vacuum tight.

Contact Durex Industries today to discuss your semiconductor heating requirements.