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Bake/Chill Platen Heaters
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Bake/Chill Platen Heaters
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The cast-in bake/chill platen heater for semiconductor processing has essentially the same operating specifications as the cast-in bake platen with the addition of a cooling function. A precision formed cooling tube is added as an integral component to the heater assembly in the body of the casting. This function can be used to rapidly cool the working surface of the cast-in platen or act as a heat exchanger for liquids or gases. A pressure test on the finished part assures the integrity of the cooling tube after the casting process. Various termination options are available to customize the cooling tube exits to existing or new applications.
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Semiconductor Equipment
HALO® Temperature Controllers
Standard Pedestal Heaters
Special Material Pedestal Heaters
Cast In Hot Chuck Heaters
Cast Vacuum Chamber Heaters
Bake Platen Heaters
Bake/Chill Pedestal Heaters
Bake/Chill Platen Heaters
High-Temperature Platen Heater
Flexible Heaters
Silicone Rubber Heaters
Kapton Heaters
Etched Foil Mica Heaters
Sentinel® Heater and Insulation Systems
RTD or Thermocouple Sensors
Cartridge Heater Assemblies
Tubular Heating Elements
Cable (Coil) Heaters
316L Immersion Heaters
Conduction Heating Panels
Radiant Heating Panels